CMQ-V Ffile.yizimg.com/1059/2010060910220848.pdf · 2015. 11. 21. · CMQ L/ min ALM EV1 EV2 Micro...
4
( 300ms ) CMQ-V No.CP-PC-1453C [ :mm] : MQV9200/9500/0002/0005/0020/0050B,C : MQV9500/0005/0010/0050/0200B,C : MQV0050/0200/0500J,K : MQV0500/1000J,K : MQV0500/1000J,K )9/16-18UNF ) 3/4-16UNF ) 3/4-16UNF ) 9/16-18UNF CMQ-V0050J,K/CMQ-V0200J,K CMQ-V0500/1000 CMQ-V0500J,K 152 146 103 46 151 145 102 45 173 172 h* h1 h2 h3 h4 h5 2-M4 5 37 2-9/16-18UNF 44 22 81 18.5 15.5 30 0.5 30 0.5 11 0.5 15 0.5 130 90 102 OK SP PV L Digital Mass Flow Controller CMQ L/min ALM EV1 EV2 RUN ENT DISP 2-M4 5 2-3/4-16UNF OK SP PV m 3 Digital Mass Flow Controller CMQ L/min ALM EV1 EV2 RUN ENT DISP h1 h2 150 (150) 110 0.5 25.3 0.5 27 0.5 11.5 0.5 25 50 44 22 h3 23.2 h4 ( ) OK SP PV m 3 Digital Mass Flow Controller CMQ L/min ALM EV1 EV2 RUN ENT DISP 88 45.8 0.2 29.3 1.6 38 33 105 93 5 4.5 12.5 35 0.2 17.5 0.2 100 0.2 90 0.2 2-M4 19 50 0.2 45 0.2 (R) 2-3/4-16UNF 20.5 h5 h1 h2 150 42.5 (150) 110 0.5 25.3 0.5 27 0.5 11.5 0.5 25 50 23.2 44 22 h3 h4 2-M4 5 37 2-9/16-18UNF 44 22 81 18.5 15.5 130 150 2 90 102 35 14 30 0.5 30 0.5 11 0.5 15 0.5 2-M4 5
Transcript of CMQ-V Ffile.yizimg.com/1059/2010060910220848.pdf · 2015. 11. 21. · CMQ L/ min ALM EV1 EV2 Micro...
(300ms)
CMQ-V
No.CP-PC-1453C[ :mm]
:MQV9200/9500/0002/0005/0020/0050B,C:MQV9500/0005/0010/0050/0200B,C
:MQV0050/0200/0500J,K :MQV0500/1000J,K:MQV0500/1000J,K
)9/16-18UNF
)3/4-16UNF )3/4-16UNF
)9/16-18UNF
CMQ-V0050J,K/CMQ-V0200J,KCMQ-V0500/1000
CMQ-V0500J,K 152 146 103 46
151 145 102 45
173
172
h*h1 h2 h3 h4 h5
2-M4 5
37
2-9/16-18UNF
4422
81
18.5
15.5
30 0.5 30 0.5
110.
515
0.5
130
90102
OK
SP
PV
L
Digital Mass Flow Controller CMQL/min
ALM EV1 EV2Micro Flow
RUN ENT DISP
2-M4 5
2-3/4-16UNF
OK
SP
PV
m3
Digital Mass Flow Controller CMQL/min
ALM EV1 EV2Micro Flow
RUN ENT DISP
h1
h2
150
(150)110 0.525.3 0.5
270.
511
.50.
5
2550
4422
h3
23.2
h4
( )OK
SP
PV
m3
Digital Mass Flow Controller CMQL/min
ALM EV1 EV2Micro Flow
RUN ENT DISP
88
45.8
0.2
29.3
1.6
3833
10593
5
4.5
12.5
350.
2
17.5
0.2
100 0.2
90 0.2
2-M4
19
50 0.2
45 0.2
(R)
2-3/4-16UNF
20.5
h5 h1 h2
150
42.5
(150)110 0.525.3 0.5
270.
511
.50.
5
2550
23.2
4422
h3 h4
2-M4 5
37
2-9/16-18UNF
4422
81
18.5
15.5
130
150
2
90102
35
14
30 0.5 30 0.5
110.
515
0.5
2-M4 5
100kPa
1) L/min(standard) 20 1 (101.325kPa(abs)) (L/min)
0 25 352) / ( )
3) x.x%SP4)
5) ( CP-SS-1835 )
6) ( : -0kPa(gauge))
7)
8) (MLP100A100)
9) RS-48510) ( :EPDM) -20
O
/ (C.F.)
12) 0.1 m
1
( )2
(Q: )
4
56
( )
( 5% )
(N.C.)
1 100%FS
1MPa(gauge)
10 90%RH( )RS-485 ( )
:DC 0 5V/1 5V/0 20mA/4 20mA( )
(PV) (SP) ( )0 ( )
DC 0 5V/1 5V/0 20mA/4 20mA( ):1 :2
DC 30V30mA( )
3 :1 (2 ):3
8 RS-485 ( ) 92400 4800 9600 19200 38400bps( 19200bps)
SUS316
EN61326:1997/A1:1998/A2:2001/A3:2003
10 60
DC 21.6 26.4V
5ms
( )
: 0.5%FS(0%FS Q 50%FS)1%FS(50%FS<Q 100%FS)
: 0.2%FS(0%FS Q<20%FS)1%SP(20%FS Q 100%FS) 3
: 0.1%FS(0%FS Q<20%FS)0.5%SP(20%FS Q 100%FS) 3
: 0.25%FS(0%FS Q 50%FS)0.5%FS(50%FS<Q 100%FS)
2%FS 0.3s(TYP.) 2%FS 0.7s(TYP.)
(N2) (O2) (Ar) (CO2) 13A(LNG:45MJ/m2)13A(LNG:46MJ/m2) 100%(GH4) 100%(C2H6) 100%(C3H6) 10
12
MQV0005 MQV0020 MQV0050(B,C) MQV0050(J,K) MQV0200 MQV0500MQV0002MQV9500MQV9200
: 0.5%FS (0%FS Q 40%FS)1%FS (40%FS<Q 80%FS)1.5%FS (80%FS<Q 100%FS)
0.3%FS(0%FS Q<25%FS)1.2%SP(25%FS Q<80%FS) 31.5%SP(80%FS Q 100%FS)
: 0.25%FS (0%FS Q 40%FS)0.5%FS (40%FS<Q 80%FS)0.75%FS (80%FS<Q 100%FS)
0.15%FS(0%FS Q<25%FS)0.6%SP (25%FS Q<80%FS) 30.75%SP(80%FS Q 100%FS)
10 50
( : 24.0V) 7
150kPa:
150kPa(gauge):
0kPa(gauge)
200kPa:200kPa(gauge)
:0kPa(gauge)
200kPa:200kPa(gauge)
:0kPa(gauge)
20kPa:
20kPa(gauge):
0kPa(gauge)
200kPa:200kPa(gauge)
:0kPa(gauge)
5.00L/min(standard)
20.0L/min(standard)
50.0L/min(standard)
50.0L/min(standard)
200L/min(standard)
500L/min(standard)
2.00L/min(standard)
0.500L/min(standard)
200mL/min(standard)
300kPa
300kPa( 10 40 )
180kPa(40 < 60 )
300kPa( 10 35 )
240kPa(35 < 50 )
DC 21.6 26.4V( 10 40 )
DC 23.5 26.4V(40 < 60 )
DC 21.6 26.4V( 10 35 )
DC 23.5 26.4V(35 < 50 )
5kPa 50kPa 100kPa 100kPa 150kPa10kPa50kPa5kPa50kPa
Rc1/2 1/2Swagelok 3/8VCR 3/4-16UNFRc1/4 1/4Swagelok 1/4VCR 9/16-18UNF
3.5kg1.2kg
DC 24V400mA
DC 24V
400mADC 24V 300mA
0 99,999,999L 0.000 99,999.999m3 0.00 999,999.99m30.0 9,999,999.9L0.00 999,999.99L1L 0.001m3 0.01m30.1L0.01L
1L/1 0.001m3/1 0.01m3/10.1L/10.01L/1
[ :L/min(standard) CMQ-V9200 mL/min(standard)]
11) ( )
13) MQV9500 100% mL/min
14) 10 100%FS 1%
15) MQV9200/9500/0002/0005 [L/min] [mL/min]
16) 1
13A(LNG:45MJ/m3)
13A(LNG:46MJ/m3)
100%100%
13 100%
MQV9200
~~ ~ ~ ~
2~200
2~2001.0~120.0
2~200
2~200
2~2000.6~60.00.4~50.0
2~200
2~2001~120
2~200
2~180
2~2000.6~60.0
1
10.5
1
1
10.20.2
1
10.5
1
1
10.2
0.004~0.500
0.004~0.5000.003~0.300
0.004~0.500
0.004~0.500
0.004~0.5000.002~0.1601.0~120.0
0.002
0.0020.001
0.002
0.002
0.0020.0010.5
0.02~2.00
0.02~2.000.010~1.200
0.02~2.00
0.02~1.60
0.02~2.000.006~0.6000.004~0.400
0.01
0.010.005
0.01
0.01
0.010.0020.002
0.04~5.00
0.04~5.000.03~3.00
0.04~5.00
0.04~5.00
0.04~5.000.02~1.600.010~1.200
0.02
0.020.01
0.02
0.02
0.020.010.005
0.2~20.0
0.2~20.00.10~12.00
0.2~20.0
0.2~20.0
0.2~20.00.06~6.00
0.1
0.10.05
0.1
0.1
0.10.02
0.4~50.0
0.4~50.00.3~30.0
0.4~50.0
0.4~50.0
0.4~50.00.2~16.0
0.4~50.0
0.4~50.00.3~30.0
0.4~50.0
0.4~50.0
0.4~50.00.2~16.0
0.2
0.20.1
0.2
0.2
0.20.1
0.2
0.20.1
0.2
0.2
0.20.1
4~500
4~5004~400
4~500
4~400
4~5002~200
2
22
2
2
2~200 2~1801 10.004~0.500 0.002 0.02~2.00 0.01 0.04~5.00 0.02 0.2~20.0 0.1 0.4~50.0 0.4~50.00.2 0.2 4~400 2
21
MQV9500 MQV0002 MQV0005 MQV0020 MQV0050(B,C) MQV0050(J,K) MQV0200 MQV0500
mL/min L/min L/min L/min L/min L/min L/min L/min L/min
~~
0.004~0.5000.004~0.500
0.0020.002
0.04~5.000.04~5.00
0.020.02
0.10~10.000.10~10.00
0.050.05
0.4~50.00.4~50.0
0.20.2
2~2002~200
11
4~5004~500
22
MQV9500 MQV0005 MQV0010 MQV0050 MQV0200 MQV0500 MQV1000
L/min L/min L/min L/min L/min L/min L/min
1
( )
(Q: )
(Q: )45
6
( )
( 5% )
- (N.C.)
1 100%FS( 1)5ms
( )
300kPa
DC 24V 300mA DC 24V 400mA
200kPa :200kPa(gauge) :0kPa(gauge)
1MPa(gauge)-10 +60
10 90%RH( )RS-485 ( )
:DC 0 5V/1 5V/0 20mA/4 20mA( )
(PV) (SP) ( )DC 0 5V/1 5V/0 20mA/4 20mA( )
:1 :2DC 30V30mA( )
3 :1 (2 ):3
8 RS-485 ( ) 92400 4800 9600 19200 38400bps( 19200bps)
SUS316
EN61326:1997/A1:1998/A2:2001/A3:2003
(H2) (He) 1112
MQV0050 MQV0200 MQV0500 MQV1000MQV0010MQV0005MQV9500
50.0L/min(standard)
200L/min(standard)
500L/min(standard)
1000L/min(standard)
10.00L/min(standard)
2%FS 0.3s(TYP.) 2%FS 0.7s(TYP.)
0.5%FS(0%FS Q 40%FS)1.0%FS(40%FS<Q 80%FS)2.0%FS(80%FS<Q 100%FS)0.25%FS(0%FS Q 40%FS)0.5%FS(40%FS<Q 100%FS)
0.5%FS(0%FS Q 80%FS)1.0%FS(80%FS<Q 100%FS)
1.0%FS(0%FS Q 80%FS)2.0%FS(80%FS<Q 100%FS)
5.00L/min(standard)
300kPa(-10 40 )
180kPa(40 < 60 )
( : 24.0V) 7
:20kPa:40kPa
:100kPa:180kPa
:40kPa:80kPa
:150kPa:250kPa
:80kPa:150kPa
:20kPa:40kPa
0.500L/min(standard)
Rc1/4 1/4Swegelok 1/4VCR 9/16-18UNF Rc1/2 1/2Swagelok 3/8VCR 3/4-16UNF
1.2kg 3.5kg
DC 21.6 26.4V
DC 21.6 26.4V(10 40 )
DC 23.5 26.4V(40 < 60 )
0.01m3/1 0.01m3/1 0.1m3/10.1L/1 1L/10.01L/1
0.00 99,999.99m3 0.0 999,999.9m30 99,999,999L0.00 999,999.99L 0.0 9,999,999.9L0.01m3 0.1m31L0.1L0.01L
03 04
2 200mL/min(standard) ( 1)0.004 0.500L/min(standard) ( 1)0.02 2.00L/min(standard) ( 1)0.04 5.00L/min(standard) ( 1)0.2 20.0L/min(standard) ( 1)0.4 50.0L/min(standard) ( 1)
SUS3161/4Rc1/4Swagelok1/4VCR9/16-18 UNF
/ ( ) ( 2)( 3)
RS-485(CPL)
MQV920095000002000500200050
BC
SRSVU
NS
1 2 3 4 5
001
001
0DY
0
MQV005002000500
JK
SRSVU
NS
001
001
0DY
0
MQV920095000002000500200050
001
Y0
BC
SRSV
12
S01
MQV02000500
JK
SRSV
12
S01
001
Y0
1 2 3 4 5
1 2 3 4 5
1 2 3 4 5
0.4 50.0L/min(standard) ( 1)2 200L/min(standard) ( 1)4 500L/min(standard) ( 1)
( 150mm)( 150mm)
SUS3161/2Rc1/2Swagelok3/8VCR3/4-16 UNF
/ ( ) ( 2)( 3)
RS-485(CPL)
2 200mL/min(standard) ( 1)0.004 0.500L/min(standard) ( 1)0.02 2.0L/min(standard) ( 1)0.04 5.00L/min(standard) ( 1)0.2 20.0L/min(standard) ( 1)0.4 50.0L/min(standard) ( 1)
SUS3161/4Rc1/4Swagelok1/4VCR
/( 3)
RS-485(CPL)
2 200L/min(standard) ( 1)4 500L/min(standard) ( 1)
( 150mm)( 150mm)
SUS3161/2Rc1/2Swagelok3/8VCR
/( 3)
RS-485(CPL)
CMQ-V
1) L/min(standard) 20 10
25 352) / ( <CO2>
LNG(45MJ/m3 46MJ/m3) 100% 100% 100%)3) ( ) ( )
MQV95000005001000500200
BC
SRSVU
H0
01
01
0DY
0
1) L/min(standard) 201
0 25 352)
0
10DY
MQV05001000
JK
SRSVU
H0
01
0
CMQ-V
MQV920095000002000500200050
BC
SS
E0
01
01
0DY
0
1) L/min(standard) 20 10 25 35
2)3)
/
MQV02000500
JK
SS
E0
01
01
0DY
0
CMQ-V
2
AC
81446681-00181446951-00181446957-00181446683-00281446858-001
20 2m20 5m
DC 24V 650mA5k 10
4 500L/min(standard) ( 1)10 1000L/min(standard) ( 1)
( 150mm)( 150mm)
SUS3161/2Rc1/2Swagelok3/8VCR3/4-16 UNF
/ ( 2)
RS-485(CPL)
0.004 0.500L/min(standard) ( 1)0.04 5.00L/min(standard) ( 1)0.10 10.00L/min(standard) ( 1)0.4 50.0L/min(standard) ( 1)2 200L/min(standard) ( 1)
SUS3161/4Rc1/4Swagelok1/4VCR9/16-18 UNF
/ ( 2)
RS-485(CPL)
2 200mL/min(standard) ( 1)0.004 0.500L/min(standard) ( 1)0.02 2.00L/min(standard) ( 1)0.04 5.00L/min(standard) ( 1)0.2 20.0L/min(standard) ( 1)0.4 50.0L/min(standard) ( 1)
SUS3161/4Swagelok
( :EPDM) ( 3)
RS-485(CPL)
1 2 3 4 5
1 2 3 4 5
1 2 3 4 5
1 2 3 4 5
05 06
2 200L/min(standard) ( 1)4 500L/min(standard) ( 1)
( 150mm)( 150mm)
SUS3161/2Swagelok
( :EPDM) ( 3)
RS-485(CPL)
