M403 Datasheet
3
4-34 Piezo • Nano • Positioning The M-403 and M-404 lin ear translation stage series provide cost-ef fective solutions for pre- cision positioning of loads up to 20 kg over travel ranges to 200 mm. They are desi gned with high-value components and feature a precision- machined, high-density, stress- relieved aluminum base for exceptional stability with mini- mum weight. Th e high ly pr ecise M- 403 drive includes a preloaded lead screw , providin g a mini mum incremental motion of 0.2 μm. For higher velocities and long lif eti me, the M-404 versi ons feature a low-friction ball screw offering a minimum incremen- tal motion down to 0.1 μm. Three motor drive options allow easy adaptation to different au- tomation applications. Five travel ranges fro m 25 to 200 mm are offered. The stages can carry up to 20 kg and push/pull up to 50 N. Special versions for vacuum applica- tions are also available (see or- dering information). Maintenance-Free, High Guid- ing Precision All models are equi pped with high -precision linear guiding rails and recirculating ball bear- ings. The recirculating ball bear- ings are maintenance free and immune to cage migration. The choice of components and care- ful mounting guarantees high load capacity , longer lifetime and high guiding accuracy. Ad- diti onall y, in the M-404 series the bearin gs are pol ish ed to achi eve the opti mum guiding accuracy. Low Cost of System Owner - ship The combination of these stages with the networkable single-axis C-863 Mer cur y™ (see p. 4-114) and C-663 Mercury™ Step (see p. 4-112) controllers offers high performance for a very competi- tive price in both singl e and mul- tiaxis con fig uratio ns. Alt er - natively, the C-843 motion con- troller PCI card with on-board servo amplifiers is available. Three Motor Drive Options The top-of-the-line M-40x.xPD hi gh- sp eed versions come equipped with the high-perfor- mance Acti veDri ve™ syst em. The Acti veDr ive™ desi gn, de- veloped by PI, featur es a high - eff ici ency PWM (pulse wid th mod ulation) ser vo- amplif ier mounted side-by-side with the DC motor and off ers several advantages: Increased efficiency, by eliminating power losses between the amplifier and motor Reduced cost of ownership and improved reliability, because no external driver is required Elimination of PWM ampli- fier noise radiation, by mounting the amplifier and motor together in a single, electrically shielded case M-40x.xDG models are equipp- ed with a DC motor and a shaft- m ou nt ed o pt ic al e nc od er, providing a minimum incremen- tal motion of down to 0.1 μm. M-40x. x2S models featur e a c os t- effe ct i ve di r ec t- dr iv e, 2-phase stepper motor, provid- ing very smooth operation and a resolution of 0.16 μm. Limit and Reference Switches For the protection of your equip- ment, non-c ontac t Hall -effect limit and reference switches are installed. The direction-sensing refer ence swit ch supp orts ad- vanced automation applications with high precision. Other Family Members The M-403/M-413 and M-404/ M-414 ser ies of li near stages form a modular sys tem. The M-403 is the basic family, pro- viding travel ranges from 25 to 200 mm. M-413 is designed for higher loads with travel ranges from 100 to 300 mm. The M-404 and M-414 s ta ge s h av e t he same travel ranges and load ca- pacities, but offer higher preci- sion and more speed. M-403 · M-404 Precision Translation Stage Cost-Effective, Large Choice of Drives & T ravel Ranges Application Examples Automation R&D Semiconductor technology Metrology Quality assurance testing Ordering Information Ask about custom designs! M-40 . 1 Travel Range 25 mm 2 Travel Range 50 mm 4 Travel Range 100 mm 6 Travel Range 150 mm 8 Travel Range 200 mm 3 Linear Translation Stage with lead screw, 80 mm wide 4 Precision-Linear Stage with ball screw, 80 mm wide PD ActiveDrive TM DC Motor (includes 24 V power supply) DG DC Motor Gearhead 2S 2-Phase Stepper Motor VP ActiveDrive TM DC-Motor (includes 24 V power supply), Vacuum Compatible to 10 -6 hPa VG DC Motor Gearhead, Vacuum Compatible to 10 -6 hPa M-403 linear stage versions (from left) M-403.1PD, M-403.2PD, M-403.4PD, M-403.6PD und M-403.8PD provide travel ranges from 25 to 200 mm For Cost-Sensitive Precision Po sitioning Applications Travel Ranges 25 to 200 mm Resolution to 0.012 μm Min. Incremental Motion to 0.1 μm Preloaded Precision Leadscrew or Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes Stress-Relieved Aluminum Base for High est Stability V acuum-CompatibleVersions Available M-413 and M-414 V ersions for Higher Load Requirements © P h y s i k I n s t r u m e n t e ( P I ) G m b H & C o . K G 2 0 0 9 . S u b j e c t t o c h a n g e w i t h o u t n o t i c e . A l l d a t a a r e s u p e r s e d e d b y a n y n e w r e l e a s e . T h e n e w e s t r e l e a s e f o r d a t a s h e e t s i s a v a i l a b l e f o r d o w n l o a d a t w w w . p i . w s . R 1 0 9 / 0 8 / 1 0 . 0
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Transcript of M403 Datasheet
8/2/2019 M403 Datasheet
http://slidepdf.com/reader/full/m403-datasheet 1/2
4-34
Piezo • Nano • Positioning
The M-403 and M-404 lineartranslation stage series providecost-effective solutions for pre-cision positioning of loads upto 20 kg over travel ranges to200 mm. They are designedwith high-value componentsand feature a precision-machined, high-density, stress-relieved aluminum base forexceptional stability with mini-mum weight.The highly precise M-403drive includes a preloaded lead
screw, providing a minimumincremental motion of 0.2 μm.For higher velocities and longlifetime, the M-404 versionsfeature a low-friction ball screw
offering a minimum incremen-tal motion down to 0.1 μm.Three motor drive options alloweasy adaptation to different au-tomation applications.Five travel ranges from 25 to200 mm are offered. The stagescan carry up to 20 kg andpush/pull up to 50 N. Specialversions for vacuum applica-tions are also available (see or-dering information).
Maintenance-Free, High Guid-
ing PrecisionAll models are equipped withhigh-precision linear guidingrails and recirculating ball bear-ings. The recirculating ball bear-ings are maintenance free andimmune to cage migration. Thechoice of components and care-ful mounting guarantees highload capacity, longer lifetimeand high guiding accuracy. Ad-ditionally, in the M-404 seriesthe bearings are polished toachieve the optimum guidingaccuracy.
Low Cost of System Owner-ship
The combination of these stageswith the networkable single-axisC-863 Mercury™ (see p. 4-114)and C-663 Mercury™ Step (seep. 4-112) controllers offers highperformance for a very competi-tive price in both singl e and mul-tiaxis configurations. Alter-natively, the C-843 motion con-troller PCI card with on-boardservo amplifiers is available.
Three Motor Drive Options
The top-of-the-line M-40x.xPDhigh-speed versions comeequipped with the high-perfor-mance ActiveDrive™ system.The ActiveDrive™ design, de-veloped by PI, features a high-efficiency PWM (pulse widthmodulation) servo-amplifiermounted side-by-side with theDC motor and offers several
advantages:Increased efficiency, byeliminating power lossesbetween the amplifier andmotor
Reduced cost of ownershipand improved reliability,because no external driver isrequired
Elimination of PWM ampli-fier noise radiation, bymounting the amplifier andmotor together in a single,electrically shielded case
M-40x.xDG models are equipp-ed with a DC motor and a shaft-mounted optical encoder,providing a minimum incremen-tal motion of down to 0.1 μm.M-40x.x2S models feature acost-effective direct-drive,2-phase stepper motor, provid-ing very smooth operation anda resolution of 0.16 μm.
Limit and Reference Switches
For the protection of your equip-ment, non-contact Hall-effectlimit and reference switches areinstalled. The direction-sensingreference switch supports ad-vanced automation applicationswith high precision.
Other Family Members
The M-403/M-413 and M-404/ M-414 series of linear stagesform a modular system. TheM-403 is the basic family, pro-
viding travel ranges from 25 to200 mm. M-413 is designed forhigher loads with travel rangesfrom 100 to 300 mm. The M-404and M-414 stages have thesame travel ranges and load ca-pacities, but offer higher preci-sion and more speed.
M-403 · M-404 Precision Translation StageCost-Effective, Large Choice of Drives &Travel Ranges
Application Examples
Automation
R&D
Semiconductor technology
Metrology
Quality assurance testing
Ordering Information
Ask about custom designs!
M-40 .
1 Travel Range 25 mm2 Travel Range 50 mm4 Travel Range 100 mm6 Travel Range 150 mm8 Travel Range 200 mm
3 Linear Translation Stage with lead screw,80 mm wide
4 Precision-Linear Stage with ball screw,80 mm wide
PD ActiveDrive TM DC Motor(includes 24 V power supply)
DG DC Motor Gearhead
2S 2-Phase Stepper Motor
VP ActiveDrive TM DC-Motor(includes 24 V power supply),Vacuum Compatible to10 -6 hPa
VG DC Motor Gearhead, VacuumCompatible to 10 -6 hPaM-403 linear stage versions (from left) M-403.1PD, M-403.2PD, M-403.4PD,
M-403.6PD und M-403.8PD provide travel ranges from 25 to 200 mm
For Cost-Sensitive Precision Positioning ApplicationsTravel Ranges 25 to 200 mmResolution to 0.012 μmMin. Incremental Motion to 0.1 μmPreloaded Precision Leadscrew or Recirculating Ball ScrewDrives Provide High Speeds & Long LifetimesStress-RelievedAluminum Base for Highest StabilityVacuum-CompatibleVersions AvailableM-413 and M-414 Versions for Higher Load Requirements
The
newestreleasefordatasheetsisavailablefordownloadatwww.pi.ws.R109/08/10.0
8/2/2019 M403 Datasheet
http://slidepdf.com/reader/full/m403-datasheet 2/2
4-35
Piezo • Nano • Positioning
M-403 and M-404 dimensions in mm, Sub-D connector15-pin, 3 m cable
Different motor versions of the M-403 linear stage family with100 mm travel range (from left) M-403.4PD (DC-motor/ActiveDrive™),
M-403.4DG (DC-motor/gearhead) and M-403.42S (stepper motor)
Technical Data
Model M-404.xPD M-404.xDG M-404.x2S M-403.xPD M-403.xDG M-403.x2S Units
Motion and positioning
Travel range for all models: 25 / 50 / 100 / 150 / 200 mm (see Order Information)
Integrated sensor Rotary encoder Rotary encoder – Rotary encoder Rotary encoder —
Sensor resolution 4000 2000 – 4000 2000 — Cts./rev.
Design resolution 0.25 0.012 0.16** 0.25 0.018 0.16** μm
Min. incremental motion 0.25 0.1 0.2 0.25 0.2 0.2 μm
Backlash 0.5 2 2 6 10 6 μm
Unidirectional repeatability 0.5 1 1 1 1 1 μm
Pitch*** ±75 ±75 ±75 ±200 ±200 ±200 μrad
Yaw*** ±75 ±75 ±75 ±200 ±200 ±200 μradMax. velocity 50 1.5 3 10* 2.5 3 mm/s
Origin repeatability 1 1 1 1 1 1 μm
Mechanical properties
Spindle Recircul ating Reci rculating Recirculating Leadscrew Leadscrew Leadscrewballscrew ballscrew ballscrew
Spindle pitch 1 1 1 1 1 1 mm
Gear ratio – 42.92063:1 – – 28.44444:1 –
Motor resolution** – – 6400** – – 6400** steps/rev.
Stiffness in motion direction 3500 3500 3500 3500 3500 3500 N/μm
Max. load 200 200 200 200 200 200 N
Max. push/pull force 50 50 50 50 50 50 N
Max. lateral force 100 100 100 100 100 100 N
Drive properties
Motor type ActiveDrive™ DC-motor, 2-phase ActiveDrive™ DC-motor, 2-phase
DC Motor gearhead stepper motor** DC Motor gearhead stepper motor**Operating voltage 24 0–12 24 24 0–12 24 V
Electrical power 26 2.5 4.8 26 2.5 4.8 W
Torque 50 3 200 50 3 200 Ncm
Limit and reference switches H all-e ffect Ha ll-effect Hall-eff ect Hall- effect Ha ll-effe ct Hall-effe ct
Miscellaneous
Operating temperature range -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 °C
Material for all models: Aluminum (black anodized)
Mass (depends on 1.7 / 1.8 / 2.1 / 2.2 / 2.5 kgdimensions/travel range)
Recommended C-863 (single-axis) C-863 (single-axis) C-663 (single-axis) C-863 (single-axis) C-863 (single-axis) C-663controller/driver C-843 PCI board C-843 PCI board C-843 PCI board C-843 PCI board (single-axis)
(up to 4 axes) (up to 4 axes) (up to 4 axes) (up to 4 axes)
*Max. recommended velocity
**2-phase stepper motor, 24 V chopper voltage, max. 0.8 A/phase, 400 full steps/rev., motor resolution with C-663 stepper motor controller
*** For travels >100 mm, the pitch/yaw value is valid for every 100 mm.Data for vacuum versions may differ.
